IIP情報・知能・精密機器部門講演会講演論文集
Online ISSN : 2424-3140
セッションID: I-04
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MEMS AE センサを用いた AE 源の位置標定
*大森 隆広碓井 隆渡部 一雄グェン ミンジュン下山 勲
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Among the many types of sensors for measuring vibration, the AE sensor is designed to measure acoustic emission, i.e., small-amplitude vibration. Most AE sensors use piezoelectric material as transducers. Compared with the piezoelectric sensors, MEMS sensors have beneficial characteristics such as low cost attributable to mass production and smaller size. The SA sensor is a type of MEMS sensor and has broad frequency bandwidth. Exploiting this characteristic, the SA sensor can be used as a multifunctional vibration sensor to measure several frequency ranges conventionally measured by multiple sensors. In this paper, PLB test results measured by SA and AE sensors are evaluated by wavelet transform to investigate the applicability of the SA sensor for AE measurement.

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