Precise position control with an accuracy of 10 μ was impossible by mechanical means such as screw movement used so far. This is because continuous movement couldn't be expected due to sliding friction from a microscopic point of view. Also, it was impossible to avoid backlash even though mechanical pressure by spring may be adopted. The authors have developed practically precise control with an accuracy of 0.2 μ by a new method utilizing the electromagnetic force. In the new equipment, dynamic characteristics are also excellent because the damping time can be designed independently of characteristic frequency by electrical damping and because resistance to deviation from exact position can be selected widely by electrical feedback from a laser interferometer. For example, 66 g-wt is necessary to move it 0.1 μ in the case of only 0.56 W electromagnet, and the time taken for it to become stationary is less than 100 msec at the present stage.