宇航计测技术 ›› 2020, Vol. 40 ›› Issue (5): 11-21.doi: 10.12060/j.issn.1000-7202.2020.05.02

• 计量技术综述 • 上一篇    下一篇

基于量子化、芯片化的先进计量测试技术发展动态

杜晓爽1；胡毅飞1；冯英强1；杨军1,2；何巍1,2；费丰3；刘原栋4；蔡静5；林敏2,6；吴爱华7；郝新友8；谌贝1；刘杰1   

  1. 1.北京无线电计量测试研究所；2.计量与校准技术重点实验室；3.中国电子科技集团公司第四十一研究所；4.中国兵器工业集团第五三研究所；5.中国航空工业集团公司北京长城计量测试技术研究所；6.中国原子能科学研究院；7.中国电子科技集团公司第十三研究所；8.国防科技工业颗粒度一级计量站。
  • 出版日期:2020-10-25 发布日期:2022-03-07
  • 作者简介:杜晓爽（1984.11-），女，高级工程师，本科，主要研究方向：时间频率计量技术及计量科研、技术规范管理。

Development Trend of Metrology and Measurement based on Quantum Effect and Chip

DU Xiao-shuang1；FENG Ying-qiang1；HU Yi-fei1；YANG Jun1,2；HE Wei1,2；FEI Feng3；LIU Yuan-dong4；CAI Jing5；LIN Min6；WU Ai-hua7；HAO Xin-you8；CHEN Bei1；LIU Jie1   

  1. 1.Beijing Institute of Radio Metrology and Measurement;2.Science and Technology on Metrology and Calibration Laboratory;3.The 41st Research Institute of CETC;4.CNGC Institute 53; 5.Changcheng institute of metrology & measurement;6.China Institute of Atomic Energy;7.The 13th Research Institute of China Electronics Technology Group Corporation;8.National Defence Science Technology Industry Particle Size First-order Metrology Station.
  • Online:2020-10-25 Published:2022-03-07

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摘要： 计量是国家质量基础的重要组成部分，产品质量的提升离不开科学、精准的计量。工业发达国家极为重视计量测试技术的发展。通过搜集、整理量子效应计量、芯片级计量等国内外大量文献资料，归纳分析了近年来国外先进计量测试技术发展动态与趋势。以量子技术和基本物理常数为基础建立量子计量基标准，将大幅提高测量准确度和稳定性，结合量子效应的微加工技术实现芯片尺度的测量等，微纳尺度计量技术也在科学研究、精密测量、智能制造等领域得到广泛应用。本文可为我国计量技术发展提供借鉴。

关键词: 量子效应, 片上计量, 太赫兹计量, 纳米尺度, 飞秒激光, 先进材料分析, 计量, 校准, 国际单位制

Abstract: Metrology is one key part of national quality foundation,its technical level directly reflects the status of the scientific and technical development.Industrial developed countries attach great importance to development of metrology and measurement.By collecting and sorting lots of documents on the quantum metrology,on-chip measurement,etc.more new standards was established,which great improved measurement accuracy and stability based on quantum effect.Micromachining technology implement on-chip measurement based on quantum effect.Otherwise nanoscale metrology is widely used in scientific research,precision measurement,intelligent manufacturing,et al.A summary of the development trend of foreign advanced metrology and measurement technology is given and a close analysis is made in this paper,providing a useful reference for the development of national metrology and measurement.

Key words: Quantum effect, On-chip measurement, Terahertz measurement, Nanoscale, Femtosecond laser, Advanced materials analysis, Metrology, Calibration, International system of units

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