A Study on the Development of a Micro-Positioning Device for Fabricating Milli-Structure

Hyeun-seok Choi; Chang-soo Han; Seung-soo Kim; Eung-zu Kim; Taehoon Choi; Kyung-hwan Na

doi:10.11499/sicep.2003.0_77_4

SICE Annual Conference 2003

DOI https://doi.org/10.11499/sicep.2003.0_77_4

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Host: The Society of Instrument and Control Engineers

Co-host: The IEEE Industrial Electronics Society, The IEEE Robotics and Automation Society, The IEEE Control Systems Society, The IEEE Systems, Man nad Cybernetics Society, The Instrumentation, Systems, and Automation Society

A Study on the Development of a Micro-Positioning Device for Fabricating Milli-Structure

*Hyeun-seok Choi, Chang-soo Han, Seung-soo Kim, Eung-zu Kim, Taehoon Choi, Kyung-hwan Na

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