Host: The Society of Instrument and Control Engineers
Co-host: IEEE/Industiral Electronic Society, IEEE/Robotics and Automation Society, IEEE/Control System Society
Pages 83
A simple and high accuracy optical intelligent alignment system using a position sensor of a diffraction grating is proposed by our Asian group. From a simulation of this system using a permeation type diffraction grating, we can conclude that it is possible to improve the wide position definition from ±0.25mm to ±12μm with the precision accuracy of ±4nm.