ABSTRACT
Two miners in a future world where the land is covered in a toxic gas accidentally discover the pre-apocalyptic history of the area. The miners accidentally bore through a protective metal shell built around the city of Paris to protect it from the toxins.
Recommendations
An ultra-thin SiO2 ALD layer for void-free bonding of III-V material on silicon
Hybrid bonding of III-V layers on silicon is demonstrated implementing an ultra-thin SiO2 atomic layer deposited - ALD - layer as the intermediate bonding layer. X-ray photoelectron spectroscopy characterization of the SiO2 layers evidences that the ...
Study of void growth in 120nm copper lines by in situ SEM
The electromigration-induced void dynamic in 120nm Cu lines is studied in situ inside a SEM. The evolutions of the void shape and growth rate are detailed, and compared to finite-element modeling (FEM). In the case of Cu/porous ULK lines with Ta/TaN ...
The effect of sputtered W-based carbide diffusion barriers on the thermal stability and void formation in copper thin films
The W-based diffusion barriers W, WC and WCN barriers were investigated for Cu metallization. The thermal stability of the W, WC and WCN barriers was compared by X-ray diffraction and four point probe. It shows comparable stability for the W and WC ...
Comments