A new reconstruction method called Generalized Vector Sampled Pattern Matching (GVSPM) has been applied to an ill-posed inverse problem involving an electrical process tomography for multiphase flow. The characteristics of GVSPM method were examined using a simulation for pseudo particle concentration distribution images. Overall, the GVSPM method was proved superior to the LW and the ITR methods in the case of annular pseudo particle images. Then, a large scale electrical capacitance tomography (ECT) system was designed to visualize the powder concentration in the process of mixing air and FCC catalysts in a vertical pipeline. The concentration distribution image was obtained its accuracy was also discussed systemically. Moreover, another research focused on the fabrication of a micro-channel and the visualization of solid-liquid two phase flow in the micro-channel. A micro-channel with commercial connecter system for 60 electrodes was fabricated. The impedance between the electrodes was measured with changed frequency, and the cross-sectional impedance was determined.