Surface metrology system based on bidirectional microdisplays

Constanze Grossmann; Franziska Perske; Susanne Zwick; Judith Baumgarten; Bernd Richter; Stefan Riehemann; Uwe Vogel; Gunther Notni; Andreas Tünnermann

doi:10.1117/12.896790

21 September 2011 Surface metrology system based on bidirectional microdisplays

Constanze Grossmann, Franziska Perske, Susanne Zwick, Judith Baumgarten, Bernd Richter, Stefan Riehemann, Uwe Vogel, Gunther Notni, Andreas Tünnermann

Author Affiliations +

Proceedings Volume 8167, Optical Design and Engineering IV; 81670Q (2011) https://doi.org/10.1117/12.896790
Event: SPIE Optical Systems Design, 2011, Marseille, France

Abstract

Typical optical metrology systems for surface and shape characterization are based on a separated camera and projection unit, yielding to a limitation concerning the miniaturization of the sensor. We present a compact, highly integrated optical distance sensor applying the inverse confocal principle using a bidirectional OLED microdisplay (BiMiD). This microdisplay combines light emitting device (AM-OLED microdisplay) and photo sensitive detectors (photodiode matrix) on one single chip based on OLED-on-CMOS-technology. Comparable to conventional confocal sensors, the object is shifted through the focal plane (±▴z) and the back reflected/scattered light is collected via an special designed optic and detected by the photo sensitive detector elements. The detected photocurrent depends on movement (▴z) of the measurement plane. In contrast to conventional confocal sensors, our inverse confocal sensor detects a minimum of reflected/scattered light if the object is positioned in the focal plane. We present a novel sensor concept as well as system and optical simulations that demonstrate the principle of the novel inverse confocal sensor setup.

Citation Download Citation

Constanze Grossmann, Franziska Perske, Susanne Zwick, Judith Baumgarten, Bernd Richter, Stefan Riehemann, Uwe Vogel, Gunther Notni, and Andreas Tünnermann "Surface metrology system based on bidirectional microdisplays", Proc. SPIE 8167, Optical Design and Engineering IV, 81670Q (21 September 2011); https://doi.org/10.1117/12.896790

ACCESS THE FULL ARTICLE

INSTITUTIONAL
Select your institution to access the SPIE Digital Library.

SELECT YOUR INSTITUTION

PERSONAL
Sign in with your SPIE account to access your personal subscriptions or to use specific features such as save to my library, sign up for alerts, save searches, etc.

PERSONAL SIGN IN

No SPIE Account? Create one

PURCHASE THIS CONTENT

SUBSCRIBE TO DIGITAL LIBRARY

50 downloads per 1-year subscription

Members: $195

Non-members: $335 ADD TO CART

25 downloads per 1 - year subscription

Members: $145

Non-members: $250 ADD TO CART

PURCHASE SINGLE ARTICLE

Includes PDF, HTML & Video, when available