Deprotonation mechanism of poly(styrene-acrylate)-based chemically amplified resist

Y. Tajima; K. Okamoto; T. Kozawa; S. Tagawa; R. Fujiyoshi; T. Sumiyoshi

doi:10.1117/12.879362

15 April 2011 Deprotonation mechanism of poly(styrene-acrylate)-based chemically amplified resist

Y. Tajima, K. Okamoto, T. Kozawa, S. Tagawa, R. Fujiyoshi, T. Sumiyoshi

Proceedings Volume 7972, Advances in Resist Materials and Processing Technology XXVIII; 79721N (2011) https://doi.org/10.1117/12.879362
Event: SPIE Advanced Lithography, 2011, San Jose, California, United States

Abstract

The influence of degree of copolymerization of poly(styrene-ran-methyl methacrylate) [P(S-MMA)] on the deprotonation mechanism for EUV chemically amplified resists were investigated by pulse radiolysis, quantity of the acid yield, and density functional theory methods. The degradation of MMA unit occurs immediately before the hole transfer to the styrene unit in P(S-MMA) in the low PS mole fraction (< 50 %). The hole transfer from MMA unit to styrene units occurred in the high PS mole fraction (> 70 %). It is assumed that the formation of styrene multimer (n > 3) causes the hole transfer.

Citation Download Citation

Y. Tajima, K. Okamoto, T. Kozawa, S. Tagawa, R. Fujiyoshi, and T. Sumiyoshi "Deprotonation mechanism of poly(styrene-acrylate)-based chemically amplified resist", Proc. SPIE 7972, Advances in Resist Materials and Processing Technology XXVIII, 79721N (15 April 2011); https://doi.org/10.1117/12.879362

ACCESS THE FULL ARTICLE

INSTITUTIONAL
Select your institution to access the SPIE Digital Library.

SELECT YOUR INSTITUTION

PERSONAL
Sign in with your SPIE account to access your personal subscriptions or to use specific features such as save to my library, sign up for alerts, save searches, etc.

PERSONAL SIGN IN

No SPIE Account? Create one

PURCHASE THIS CONTENT

SUBSCRIBE TO DIGITAL LIBRARY

50 downloads per 1-year subscription

Members: $195

Non-members: $335 ADD TO CART

25 downloads per 1 - year subscription

Members: $145

Non-members: $250 ADD TO CART

PURCHASE SINGLE ARTICLE

Includes PDF, HTML & Video, when available