Platinum Kirkpatrik-Baez mirrors for a hard x-ray microfocusing system made by profile coating

Bing Shi; Chian Liu; Jun Qian; Wenjun Liu; Lahsen Assoufid; Ali Khounsary; Raymond Conley Jr.; Albert T. Macrander

doi:10.1117/12.861044

27 August 2010 Platinum Kirkpatrik-Baez mirrors for a hard x-ray microfocusing system made by profile coating

Bing Shi, Chian Liu, Jun Qian, Wenjun Liu, Lahsen Assoufid, Ali Khounsary, Raymond Conley Jr., Albert T. Macrander

Proceedings Volume 7802, Advances in X-Ray/EUV Optics and Components V; 78020G (2010) https://doi.org/10.1117/12.861044
Event: SPIE Optical Engineering + Applications, 2010, San Diego, California, United States

Abstract

We report a successful fabrication and testing of the first set of Platinum (Pt)-coated Kirkpatrik-Baez (KB) mirrors for a submicrofocusing x-ray polychromatic beam from a conventional beamline (64 m long) at the 34-ID of Advanced Photon Source (APS). The set includes one 80 mm long mirror and one 40 mm short mirror fabricated by depositing Pt on finely polished spherical Silicon (Si) substrates using the APS-developed profile coating technique with the magnetron sputtering system. Profile coating masks were calculated through the coating profile data from metrology measurements acquired using interferometric stitching technique. Instead of flat substrates, spherical substrates (with shapes approximately mimicking the tangential profiles of the desired ellipses) were used, reducing the coating thickness and, thus, stress. The mirror pair was commissioned on the beamline and generated a 2-D spot with full width at half maximum (FWHM) 280 nm (V) x 150 nm (H). The detailed fabrication methods, metrology measurements, and calculations are discussed.

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Bing Shi, Chian Liu, Jun Qian, Wenjun Liu, Lahsen Assoufid, Ali Khounsary, Raymond Conley Jr., and Albert T. Macrander "Platinum Kirkpatrik-Baez mirrors for a hard x-ray microfocusing system made by profile coating", Proc. SPIE 7802, Advances in X-Ray/EUV Optics and Components V, 78020G (27 August 2010); https://doi.org/10.1117/12.861044

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