PERSONAL Sign in with your SPIE account to access your personal subscriptions or to use specific features such as save to my library, sign up for alerts, save searches, etc.
Thin film acoustic wave resonators are typical layered structures consisting of piezoelectric and metal films serving as
essential elements of resonance and excitation. Such a layered structure can be analyzed for the proper selection of the
thicknesses of thin films based on the vibration frequency and resonator property. In recent studies on thin film acoustic
wave resonators, especially the film bulk acoustic wave resonators (FBAR) and solidly mounted resonators (SMR)
types, extensive fabrication and characterization efforts have been contributing to the development of many novel
products and processing technology. The recently renewed global interests on the FBAR technology also expect the
design of resonators can be done through sophisticated analysis with wave propagation and circuit theories. These
requirements have motivated our studies on the vibrations of layered piezoelectric structures for applications in the
FBAR resonator analysis and design. Based on the justified assumption that the microstructure of FBAR can also be
treated as infinite plates, the vibration frequencies of the thickness-extension and thickness-shear types are calculated
from layered models with perfectly bonded interfaces. The calculated frequencies are in good agreement with
experimental data. We now extend the analysis to SMR structures, which have much more bonded layers of
piezoelectric and metal films under the same assumption of infinite plates and perfect interfaces. The vibration solutions
are given in terms of frequency and displacements. These results can be used for the proper determination of the film
thicknesses and selection of materials based on the resonator frequency which can be calculated from mechanical
vibrations.
Ji Wang,Jiansong Liu,Jianke Du,Dejin Huang, andWeiqiu Chen
"The free vibrations of layered thin film plates and applications in resonator analysis", Proc. SPIE 7493, Second International Conference on Smart Materials and Nanotechnology in Engineering, 749344 (20 October 2009); https://doi.org/10.1117/12.842923
ACCESS THE FULL ARTICLE
INSTITUTIONAL Select your institution to access the SPIE Digital Library.
PERSONAL Sign in with your SPIE account to access your personal subscriptions or to use specific features such as save to my library, sign up for alerts, save searches, etc.
The alert did not successfully save. Please try again later.
Ji Wang, Jiansong Liu, Jianke Du, Dejin Huang, Weiqiu Chen, "The free vibrations of layered thin film plates and applications in resonator analysis," Proc. SPIE 7493, Second International Conference on Smart Materials and Nanotechnology in Engineering, 749344 (20 October 2009); https://doi.org/10.1117/12.842923