The manufacturing and testing of an unrotational-symmetric SiC mirror

Feng Yan; Di Fan; Bin-zhi Zhang; Xue-jun Zhang

doi:10.1117/12.794022

11 August 2008 The manufacturing and testing of an unrotational-symmetric SiC mirror

Feng Yan, Di Fan, Bin-zhi Zhang, Xue-jun Zhang

Proceedings Volume 7064, Interferometry XIV: Applications; 70640D (2008) https://doi.org/10.1117/12.794022
Event: Optical Engineering + Applications, 2008, San Diego, California, United States

Abstract

In previous work, wavefront coding technology has been applied on an off-axis three mirror anastigmatic optical system. The secondary mirror is selected as the wavefront coded element. After redesigned the surface of secondary mirror becomes an unusual unrotational-symmetric surface with cubic term, which can not be tested by traditional null testing with compensator. For preparing for manufacturing and testing this kind of elements, a simple cubic surface whose equation is z=3λ(x³ + y³) (where x, y is normalized coordinate, λ=0.6328 μm) is polished. The final surface figure is 0.327λ(PV) and 0.023λ(RMS). The manufacture of this surface is introduced in this paper. The tilt component is subtracted to minimize the material removal. Also a non-null method is described for testing the experimental element. The deviation from a reference plane of the cubic surface is regarded as system error. In another words, the ideal cubic surface is set as the reference artificially. A special system error file for interferometer can be created so that the cubic term can be extracted during the testing process automatically. The residual error is just the departure from the ideal figure of the surface under machining by this way. The error and effective range is also presented. But the method may not be practical for the secondary mirror as wavefront coded element because the surface of that kind is convex asphere added cubic term. An improved non-null method is discussed for testing this kind of surface.

Citation Download Citation

Feng Yan, Di Fan, Bin-zhi Zhang, and Xue-jun Zhang "The manufacturing and testing of an unrotational-symmetric SiC mirror", Proc. SPIE 7064, Interferometry XIV: Applications, 70640D (11 August 2008); https://doi.org/10.1117/12.794022

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KEYWORDS

Surface finishing

Aspheric lenses

Mirrors

Wavefronts

Manufacturing

Interferometers

Testing and analysis

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