A novel parameter proposed for 2D and 3D topography measurements and comparisons

John Song; Ted Vorburger

doi:10.1117/12.734424

10 September 2007 A novel parameter proposed for 2D and 3D topography measurements and comparisons

John Song, Ted Vorburger

Proceedings Volume 6672, Advanced Characterization Techniques for Optics, Semiconductors, and Nanotechnologies III; 66720M (2007) https://doi.org/10.1117/12.734424
Event: Optical Engineering + Applications, 2007, San Diego, California, United States

Abstract

Based on the cross-correlation function (CCF), a new parameter called profile difference, D_s (or topography difference for 3D), is developed for measurement and comparison of 2D profiles and 3D topographies. When D_s = 0, the two compared profiles or topographies must be exactly the same (point by point). A 2D and 3D topography measurement system was established at the National Institute of Standards and Technology (NIST), that includes data acquisition stations using stylus instruments and a confocal microscope, and a correlation program using the proposed parameter D_s and the cross-correlation function maximum CCF_max. This system has been used for 2D and 3D ballistics signature measurements of the NIST Standard Reference Material (SRM) 2461/2461 Standard Bullets and Casings, and received high measurement reproducibility. It is suggested that the proposed parameter and algorithm can be generally used for measurement and comparison of 2D and 3D surface topographies in surface metrology and other areas.

Citation Download Citation

John Song and Ted Vorburger "A novel parameter proposed for 2D and 3D topography measurements and comparisons", Proc. SPIE 6672, Advanced Characterization Techniques for Optics, Semiconductors, and Nanotechnologies III, 66720M (10 September 2007); https://doi.org/10.1117/12.734424

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