Alternating PSM for sub-60-nm DRAM gate single exposure

Kunyuan Chen; Richard Lu; Kuo Kuei Fu; ChungPing Hsia; Chiang-Lin Shih; JengPing Lin

doi:10.1117/12.685295

20 October 2006 Alternating PSM for sub-60-nm DRAM gate single exposure

Kunyuan Chen, Richard Lu, Kuo Kuei Fu, ChungPing Hsia, Chiang-Lin Shih, JengPing Lin

Proceedings Volume 6349, Photomask Technology 2006; 63491T (2006) https://doi.org/10.1117/12.685295
Event: SPIE Photomask Technology, 2006, Monterey, California, United States

Abstract

The fast pattern shrinkage of DRAM has driven the lithography technology into the low k1 regime for sub-60 nm technology node. There are a lot of resolution enhancement techniques (RETs) e.g. OPC (Optical Proximity Correction), SB (Scattering Bar), SRAF (Sub-Resolution Assist Features) and DDL (Double Dipole Lithography) and Alternating PSM to enable the low k1 lithography [4]. However, among the RETs, the alternating PSM technique is a high cost solution because double exposure is needed to avoid phase conflict error. Therefore, the implementation of alternating PSM with single exposure for gate conductor layer is the main purpose of this study. Many kinds of pattern and phase designs in the main cell and periphery were investigated.

Citation Download Citation

Kunyuan Chen, Richard Lu, Kuo Kuei Fu, ChungPing Hsia, Chiang-Lin Shih, and JengPing Lin "Alternating PSM for sub-60-nm DRAM gate single exposure", Proc. SPIE 6349, Photomask Technology 2006, 63491T (20 October 2006); https://doi.org/10.1117/12.685295

ACCESS THE FULL ARTICLE

INSTITUTIONAL
Select your institution to access the SPIE Digital Library.

SELECT YOUR INSTITUTION

PERSONAL
Sign in with your SPIE account to access your personal subscriptions or to use specific features such as save to my library, sign up for alerts, save searches, etc.

PERSONAL SIGN IN

No SPIE Account? Create one

PURCHASE THIS CONTENT

SUBSCRIBE TO DIGITAL LIBRARY

50 downloads per 1-year subscription

Members: $195

Non-members: $335 ADD TO CART

25 downloads per 1 - year subscription

Members: $145

Non-members: $250 ADD TO CART

PURCHASE SINGLE ARTICLE

Includes PDF, HTML & Video, when available