Mask process variation induced OPC accuracy in sub-90nm technology node

Se-Jin Park; Yeon-Ah Shim; Jae-Hyun Kang; Jae-Young Choi; Kyung-Hee Yoon; Yong-Suk Lee; Keeho Kim

doi:10.1117/12.657036

20 March 2006 Mask process variation induced OPC accuracy in sub-90nm technology node

Se-Jin Park, Yeon-Ah Shim, Jae-Hyun Kang, Jae-Young Choi, Kyung-Hee Yoon, Yong-Suk Lee, Keeho Kim

Proceedings Volume 6154, Optical Microlithography XIX; 61543K (2006) https://doi.org/10.1117/12.657036
Event: SPIE 31st International Symposium on Advanced Lithography, 2006, San Jose, California, United States

Abstract

Since an OPC engine makes model to fit wafer printed CD of OPC test mask to simulation CD of test pattern layout, the target CD of OPCed mask is not design CD but the CD of OPC test mask. So, the CD difference between OPC test mask and OPCed mask is one of the most important error source of OPC. We experimentally obtained OPC CD error of several patterns such as iso line, iso space, dense line, line end, effected by the mask MTT (mean to target) difference of the two masks on of 90nm logic pattern with an ArF attenuated mask having designed different MTT. The error is compared to simulated data that is calculated with MEEF (mask error enhancement factor) and EL (exposure latitude) data of these patterns. The good agreement of the experimental and calculated OPC error effected mask MTT error can make OPC error are predicted by mask CD error. Using by these calculation, we made mask CD window to meet OPC spec for 90nm ArF process.

Citation Download Citation

Se-Jin Park, Yeon-Ah Shim, Jae-Hyun Kang, Jae-Young Choi, Kyung-Hee Yoon, Yong-Suk Lee, and Keeho Kim "Mask process variation induced OPC accuracy in sub-90nm technology node", Proc. SPIE 6154, Optical Microlithography XIX, 61543K (20 March 2006); https://doi.org/10.1117/12.657036

ACCESS THE FULL ARTICLE

INSTITUTIONAL
Select your institution to access the SPIE Digital Library.

SELECT YOUR INSTITUTION

PERSONAL
Sign in with your SPIE account to access your personal subscriptions or to use specific features such as save to my library, sign up for alerts, save searches, etc.

PERSONAL SIGN IN

No SPIE Account? Create one

PURCHASE THIS CONTENT

SUBSCRIBE TO DIGITAL LIBRARY

50 downloads per 1-year subscription

Members: $195

Non-members: $335 ADD TO CART

25 downloads per 1 - year subscription

Members: $145

Non-members: $250 ADD TO CART

PURCHASE SINGLE ARTICLE

Includes PDF, HTML & Video, when available