Optical properties of superthin niobium films deposited on crystalline quartz

L. A. Kuzik; V. N. Spiridonov; V. A. Yakovlev; Guerman N. Zhizhin; Fedor A. Pudonin; Peter Grosse; B. Heinz

doi:10.1117/12.56352

1 March 1992 Optical properties of superthin niobium films deposited on crystalline quartz

L. A. Kuzik, V. N. Spiridonov, V. A. Yakovlev, Guerman N. Zhizhin, Fedor A. Pudonin, Peter Grosse, B. Heinz

Proceedings Volume 1575, 8th Intl Conf on Fourier Transform Spectroscopy; (1992) https://doi.org/10.1117/12.56352
Event: Eighth International Conference on Fourier Transform Spectroscopy, 1991, Lubeck-Travemunde, Germany

Abstract

Optical properties of ultrathin metal (Nb) films (1.5 angstroms - 20 angstroms) on (alpha) - quartz have been studied. On quartz the metal films were prepared by radio frequency sputtering. Such films shows metallic behavior even for the thickness of a few angstroms. Then the samples were covered by a 50 angstroms Si protective film. As was found earlier, the imaginary part of dielectric function (Im(Epsilon) ) of Nb depends on the thickness nonmonotonically and has maximum at 6 angstroms. To study this effect in more detail we have used two sets of samples with thickness increasing from sample to sample on 2 angstroms and on 1.5 angstroms. All spectra were recorded using Fourier-transform spectrometer Michelson-110 (BOMEM).

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L. A. Kuzik, V. N. Spiridonov, V. A. Yakovlev, Guerman N. Zhizhin, Fedor A. Pudonin, Peter Grosse, and B. Heinz "Optical properties of superthin niobium films deposited on crystalline quartz", Proc. SPIE 1575, 8th Intl Conf on Fourier Transform Spectroscopy, (1 March 1992); https://doi.org/10.1117/12.56352

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