Error transfer function for grating interferometer

De-Fu Hao

doi:10.1117/12.49424

1 October 1991 Error transfer function for grating interferometer

De-Fu Hao

Proceedings Volume 1545, International Conference on the Application and Theory of Periodic Structures; (1991) https://doi.org/10.1117/12.49424
Event: San Diego, '91, 1991, San Diego, CA, United States

Abstract

An interferometer consisting of a reflective diffraction grating, a beam splitter, and an incandescent lamp can be used for fine displacement measurements. For analyzing how grating ruling errors influence the interferometer's precision, the paper presents an error transfer function. The transfer function disperses the accidental ruling errors so the equi-spaced interference fringes can get by the interferometer. The fringe signal equi-spaced errors are about 10 -2 nm in theory.

Citation Download Citation

De-Fu Hao "Error transfer function for grating interferometer", Proc. SPIE 1545, International Conference on the Application and Theory of Periodic Structures, (1 October 1991); https://doi.org/10.1117/12.49424

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