Single two-axis micromachined tilt mirror and linear array

Michael R. Whitley; Jay A. Hammer; Zhili Hao; Brian Wingfield; Luis Nelson

doi:10.1117/12.472858

20 January 2003 Single two-axis micromachined tilt mirror and linear array

Michael R. Whitley, Jay A. Hammer, Zhili Hao, Brian Wingfield, Luis Nelson

Proceedings Volume 4985, MOEMS Display and Imaging Systems; (2003) https://doi.org/10.1117/12.472858
Event: Micromachining and Microfabrication, 2003, San Jose, CA, United States

Abstract

A scanning two-axis tilt mirror has been modeled, fabricated and tested. The tilt mirror device is fabricated from single crystal silicon using bulk micromachining technology. The mirror is octagonal and is suspended by outer torsion hinges, a gimbal, and inner torsion hinges. Response to a driving voltage is investigated, along with frequency response. Finite element modeling was performed and the results compared with experimental data, with good agreement. Using automated and semi-automated placement equipment, linear arrays of the tilt mirrors have been produced.

Citation Download Citation

Michael R. Whitley, Jay A. Hammer, Zhili Hao, Brian Wingfield, and Luis Nelson "Single two-axis micromachined tilt mirror and linear array", Proc. SPIE 4985, MOEMS Display and Imaging Systems, (20 January 2003); https://doi.org/10.1117/12.472858

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