Structure and optical properties of a-C:H/a-SiOx:H multilayer thin films

Wei Ping Zhang; Jing Bao Cui; Shan Xie; Yi Zhou Song; Changsui Wang; Guien Zhou; Jian Xin Wu

doi:10.1117/12.47274

1 November 1991 Structure and optical properties of a-C:H/a-SiO_x:H multilayer thin films

Wei Ping Zhang, Jing Bao Cui, Shan Xie, Yi Zhou Song, Changsui Wang, Guien Zhou, Jian Xin Wu

Proceedings Volume 1519, International Conference on Thin Film Physics and Applications; (1991) https://doi.org/10.1117/12.47274
Event: International Conference on Thin Film Physics and Applications, 1991, Shanghai, China

Abstract

Amorphous multilayer thin film a-C:H/a-Si:H was deposited by magnetron sputtering. X-ray diffraction and Auger electron spectroscopy measurements indicate very well the periodicity of the sample. The shift and broadening of the photoluminescence peak are interpreted in light of quantum size effect.

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Wei Ping Zhang, Jing Bao Cui, Shan Xie, Yi Zhou Song, Changsui Wang, Guien Zhou, and Jian Xin Wu "Structure and optical properties of a-C:H/a-SiO_x:H multilayer thin films", Proc. SPIE 1519, International Conference on Thin Film Physics and Applications, (1 November 1991); https://doi.org/10.1117/12.47274

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