Design optimization of an electrostatically driven micro scanning mirror

Harald Schenk; Alexander Wolter; Hubert K. Lakner

doi:10.1117/12.443106

2 October 2001 Design optimization of an electrostatically driven micro scanning mirror

Harald Schenk, Alexander Wolter, Hubert K. Lakner

Proceedings Volume 4561, MOEMS and Miniaturized Systems II; (2001) https://doi.org/10.1117/12.443106
Event: Micromachining and Microfabrication, 2001, San Francisco, CA, United States

Abstract

A design optimization of the electrostatically driven 1D Micro Scanning Mirror developed at the Fraunhofer Institute of Microelectronical Circuits and Systems has been carried out. The improvements are based on the use of non-Manhattan shaped structures for the mirror plate and the driving electrode combs. Several new design variants have been fabricated, characterized and are compared with devices of the previous design comprising quadratic mirror plates. The advantage of lower inertial moment favors the circular and elliptic design of the mirror plate. The capacity variation has been increased significantly by a special arrangement of the driving electrode fingers. Especially, a comb with star shaped fingers allows us to enhance the capacity variation remarkably. The experimental characterization of the devices shows that the elliptic plate with star shaped electrode combs is the variant to favor when the application requires large deflection angles for a given driving voltage and characteristic frequency. This meets the theoretical based expectation although the experimentally determined damping factor of devices with this design is significantly larger than for design variants with elliptic mirror plate and parallel electrode fingers. Devices of the novel design achieve mechanical deflection angles of up to +/- 14.0 degree(s) at a driving voltage of 11 V at low oscillation frequency. In comparison to the previous design this is an increase of 35 %.

Citation Download Citation

Harald Schenk, Alexander Wolter, and Hubert K. Lakner "Design optimization of an electrostatically driven micro scanning mirror", Proc. SPIE 4561, MOEMS and Miniaturized Systems II, (2 October 2001); https://doi.org/10.1117/12.443106

ACCESS THE FULL ARTICLE

INSTITUTIONAL
Select your institution to access the SPIE Digital Library.

SELECT YOUR INSTITUTION

PERSONAL
Sign in with your SPIE account to access your personal subscriptions or to use specific features such as save to my library, sign up for alerts, save searches, etc.

PERSONAL SIGN IN

No SPIE Account? Create one

PURCHASE THIS CONTENT

SUBSCRIBE TO DIGITAL LIBRARY

50 downloads per 1-year subscription

Members: $195

Non-members: $335 ADD TO CART

25 downloads per 1 - year subscription

Members: $145

Non-members: $250 ADD TO CART

PURCHASE SINGLE ARTICLE

Includes PDF, HTML & Video, when available