Mask manufacturing contribution on 248-nm and 193-nm lithography performances

Alexandra Barberet; Gilles L. Fanget; Jean-Charles Richoilley; Michel Tissier; Yves Quere

doi:10.1117/12.425081

9 April 2001 Mask manufacturing contribution on 248-nm and 193-nm lithography performances

Alexandra Barberet, Gilles L. Fanget, Jean-Charles Richoilley, Michel Tissier, Yves Quere

Proceedings Volume 4349, 17th European Conference on Mask Technology for Integrated Circuits and Microcomponents; (2001) https://doi.org/10.1117/12.425081
Event: 17th European Conference on Mask Technology for Integrated Circuits and Microcomponents, 2000, Munich, Germany

Abstract

In this study, we focus on mask manufacturing contribution on 248 nm and 193 nm lithography performances. The masks are manufactured at DPI using both E-beam/laser writing technologies (e-beam/laser) and two etching processes (wet/dry). Masks are optimized for 150 nm node at wafer scale, neither RET not tuning are used, despite of this, we obtain excellent and unexpected results for inferior nodes which highlight the robustness of the manufacturing mask process being used.

Citation Download Citation

Alexandra Barberet, Gilles L. Fanget, Jean-Charles Richoilley, Michel Tissier, and Yves Quere "Mask manufacturing contribution on 248-nm and 193-nm lithography performances", Proc. SPIE 4349, 17th European Conference on Mask Technology for Integrated Circuits and Microcomponents, (9 April 2001); https://doi.org/10.1117/12.425081

ACCESS THE FULL ARTICLE

INSTITUTIONAL
Select your institution to access the SPIE Digital Library.

SELECT YOUR INSTITUTION

PERSONAL
Sign in with your SPIE account to access your personal subscriptions or to use specific features such as save to my library, sign up for alerts, save searches, etc.

PERSONAL SIGN IN

No SPIE Account? Create one

PURCHASE THIS CONTENT

SUBSCRIBE TO DIGITAL LIBRARY

50 downloads per 1-year subscription

Members: $195

Non-members: $335 ADD TO CART

25 downloads per 1 - year subscription

Members: $145

Non-members: $250 ADD TO CART

PURCHASE SINGLE ARTICLE

Includes PDF, HTML & Video, when available