Scaling laws of microactuators and potential applications of electroactive polymers in MEMS

Chang Liu; Yoseph Bar-Cohen

doi:10.1117/12.349692

28 May 1999 Scaling laws of microactuators and potential applications of electroactive polymers in MEMS

Chang Liu, Yoseph Bar-Cohen

Proceedings Volume 3669, Smart Structures and Materials 1999: Electroactive Polymer Actuators and Devices; (1999) https://doi.org/10.1117/12.349692
Event: 1999 Symposium on Smart Structures and Materials, 1999, Newport Beach, CA, United States

Abstract

Besides the scale factor that distinguishes the various spices fundamentally biological muscles changes little between species indicating a highly optimized system, Electroactive polymer actuators offer the closest resemblance to biological muscles however beside the large actuation displacement these materials are falling short with regards to the actuation force. As improved materials emerging it is becoming necessary to address key issues such as the need for effective electromechanical modeling and guiding parameters in scaling the actuators. In this paper, we will review the scaling laws for three major actuation mechanisms that are of relevance to micro electromechanical systems: electrostatic actuation, magnetic actuation, thermal bimetallic actuation, and piezoelectric actuation.

Citation Download Citation

Chang Liu and Yoseph Bar-Cohen "Scaling laws of microactuators and potential applications of electroactive polymers in MEMS", Proc. SPIE 3669, Smart Structures and Materials 1999: Electroactive Polymer Actuators and Devices, (28 May 1999); https://doi.org/10.1117/12.349692

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