Applications of EUV metrology tools

Matt Hettermann

doi:10.1117/12.3012429

26 September 2023 Applications of EUV metrology tools

Matt Hettermann

Proceedings Volume PC12915, Photomask Japan 2023: XXIX Symposium on Photomask and Next-Generation Lithography Mask Technology; PC1291502 (2023) https://doi.org/10.1117/12.3012429
Event: Photomask Japan 2023, 2023, Online Only

Abstract

This conference presentation was prepared for Photomask Japan 2023.

Conference Presentation

Citation Download Citation

Matt Hettermann "Applications of EUV metrology tools", Proc. SPIE PC12915, Photomask Japan 2023: XXIX Symposium on Photomask and Next-Generation Lithography Mask Technology, PC1291502 (26 September 2023); https://doi.org/10.1117/12.3012429

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