Modularized microelectromechanical devices as key components for advanced intelligent autonomous sensors and control systems

Matthias Schuenemann; Volker Grosser; Rudolf Leutenbauer; Peter Matuscheck; Wolfgang Schaefer; Herbert Reichl

doi:10.1117/12.298007

2 January 1998 Modularized microelectromechanical devices as key components for advanced intelligent autonomous sensors and control systems

Matthias Schuenemann, Volker Grosser, Rudolf Leutenbauer, Peter Matuscheck, Wolfgang Schaefer, Herbert Reichl

Author Affiliations +

Proceedings Volume 3201, Sensors and Controls for Advanced Manufacturing; (1998) https://doi.org/10.1117/12.298007
Event: Intelligent Systems and Advanced Manufacturing, 1997, Pittsburgh, PA, United States

Abstract

A highly flexible, modular design and production framework for microelectromechanical systems, suitable for mid-scale production at reasonable costs, is presented. The modulator framework, similar to unit construction system well-known in the macro world, consists of a manufacturer set and an application kit. It allows for considerable reduction of design and production expenditure while retaining maximum technical flexibility. The feasibility of the modular approach is demonstrated by the presentation and discussion of a novel modular vertical integration technique.

Citation Download Citation

Matthias Schuenemann, Volker Grosser, Rudolf Leutenbauer, Peter Matuscheck, Wolfgang Schaefer, and Herbert Reichl "Modularized microelectromechanical devices as key components for advanced intelligent autonomous sensors and control systems", Proc. SPIE 3201, Sensors and Controls for Advanced Manufacturing, (2 January 1998); https://doi.org/10.1117/12.298007

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