Ultra-broadband and low loss silicon photonic power splitter with enhanced coupling of subwavelength waveguides

Longsheng Wu; Hanyue Li; Aimin Wu

doi:10.1117/12.2690168

17 August 2023 Ultra-broadband and low loss silicon photonic power splitter with enhanced coupling of subwavelength waveguides

Longsheng Wu, Hanyue Li, Aimin Wu

Author Affiliations +

Proceedings Volume 12757, 3rd International Conference on Laser, Optics, and Optoelectronic Technology (LOPET 2023); 127571W (2023) https://doi.org/10.1117/12.2690168
Event: 3rd International Conference on Laser, Optics and Optoelectronic Technology (LOPET 2023), 2023, Kunming, China

Abstract

An on-chip optical power splitter is a crucial component for optical signal processing, widely used to implement Mach-Zehnder Interferometer, 1×2 switches, and optical arrays for various photonic integrated circuit (PIC) applications. In this paper, we present a tapered silicon waveguide power splitter with assisted subwavelength gratings (SWGs) that enhances coupling between waveguides and relaxes the critical dimensions requirement of the devices, with a taper tip width of 100 nm. The three-dimensional Finite-Difference-Time-Domain (3D-FDTD) simulation results demonstrate that the splitter has a low loss of only 0.1 dB over an ultra-broad wavelength range from 1200 nm to 1700 nm. The dependence of the performance on geometry variations, including tip width, gap spacing, waveguide width, and thickness of the device layer, is also investigated to illustrate the fabrication tolerance. The power splitter is also proved to be temperature-insensitive. With the advantages of low loss, ultra-broadband, fabrication-tolerant, temperature-insensitive, and relaxed critical dimensions (≥100 nm), the proposed power splitter is a promising practical building block for large-scale PICs.

Citation Download Citation

Longsheng Wu, Hanyue Li, and Aimin Wu "Ultra-broadband and low loss silicon photonic power splitter with enhanced coupling of subwavelength waveguides", Proc. SPIE 12757, 3rd International Conference on Laser, Optics, and Optoelectronic Technology (LOPET 2023), 127571W (17 August 2023); https://doi.org/10.1117/12.2690168

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KEYWORDS

Waveguides

Silicon photonics

Tolerancing

Silicon

Photonic integrated circuits

Refractive index

Beam splitters

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