Measurement and analysis of a 4″-18″ aperture dual-beam Fizeau interferometer

Yuhang Shen; Ying Yang; Sen Han; Xueyuan Li; Linghua Zhang; Chenxi Gong; Jingming Gou; Wujun Lv; Manlin Han; Quanzhao Wang; Bo Zhang; Jincheng Zhuang

doi:10.1117/12.2687259

27 November 2023 Measurement and analysis of a 4″-18″ aperture dual-beam Fizeau interferometer

Yuhang Shen, Ying Yang, Sen Han, Xueyuan Li, Linghua Zhang, Chenxi Gong, Jingming Gou, Wujun Lv, Manlin Han, Quanzhao Wang, Bo Zhang, Jincheng Zhuang

Author Affiliations +

Proceedings Volume 12769, Optical Metrology and Inspection for Industrial Applications X; 127690H (2023) https://doi.org/10.1117/12.2687259
Event: SPIE/COS Photonics Asia, 2023, Beijing, China

Abstract

A dual-beam Fizeau interferometry with both small and large aperture two measurement modes is proposed. The two modes of the interferometer were measured and analyzed using three-flat four-step absolute measurement and three-flat simulated sinusoidal phase grating. An integrated 4″-18″ aperture dual-beam Fizeau interferometer was used to perform experiments on large and small aperture by the above two measurement methods. The experimental results show that the absolute surface errors of the three flats are less than λ/20(PV) and λ/100(RMS), and the transfer function is better than 0.78 at the 1 mm-1 spatial frequency, which satisfies the specification.

(2023) Published by SPIE. Downloading of the abstract is permitted for personal use only.

Citation Download Citation

Yuhang Shen, Ying Yang, Sen Han, Xueyuan Li, Linghua Zhang, Chenxi Gong, Jingming Gou, Wujun Lv, Manlin Han, Quanzhao Wang, Bo Zhang, and Jincheng Zhuang "Measurement and analysis of a 4″-18″ aperture dual-beam Fizeau interferometer", Proc. SPIE 12769, Optical Metrology and Inspection for Industrial Applications X, 127690H (27 November 2023); https://doi.org/10.1117/12.2687259

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