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5 October 2023 Metasurface layout correction algorithm for intra-atom fabrication compatibility
Pavel D. Terekhov, Shengyuan Chang, Md Tarek Rahman, Sadman Shafi, Xingjie Ni
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Proceedings Volume PC12653, Nanoengineering: Fabrication, Properties, Optics, Thin Films, and Devices XX; PC126530A (2023) https://doi.org/10.1117/12.2677779
Event: SPIE Nanoscience + Engineering, 2023, San Diego, California, United States
Abstract
We propose a rigorous algorithm for checking and replacing meta-atoms in the arbitrary metasurface layout, based on any preconditioned element library. To showcase the algorithm performance, we design the small metalens based on arbitrarily shaped nanoparticles with four-fold symmetry. We note that layout and lookup tables can depend on any desired optical parameters provided by the atom, and for each point, the best compatible element will be chosen. This algorithm can help the photonics community to fully exploit the design degree of freedom associated with the generation of arbitrary meta-atom shapes, and to access the new properties of metadevices.
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Pavel D. Terekhov, Shengyuan Chang, Md Tarek Rahman, Sadman Shafi, and Xingjie Ni "Metasurface layout correction algorithm for intra-atom fabrication compatibility", Proc. SPIE PC12653, Nanoengineering: Fabrication, Properties, Optics, Thin Films, and Devices XX, PC126530A (5 October 2023); https://doi.org/10.1117/12.2677779
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KEYWORDS
Fabrication
Chemical species
Design and modelling
Photonics
Nanoparticles
Numerical analysis
Optical components
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