Simulation of system transmission values for different angles of incidence

Michael Wagner

doi:10.1117/12.2676121

5 September 2023 Simulation of system transmission values for different angles of incidence

Michael Wagner

Proceedings Volume 12755, Tenth European Seminar on Precision Optics Manufacturing; 1275509 (2023) https://doi.org/10.1117/12.2676121
Event: Tenth European Seminar on Precision Optics Manufacturing (POM23), 2023, Teisnach, Germany

Abstract

For the design of a new asphere measuring system, it is necessary to know transmission values for a system consisting of a source, an optional auxiliary filter and an optical filter, on which angle-tuning is performed. To generate these transmission values for different angles of incidence and polarizations a simulation program was created. Input data of the simulation were based on data provided by the manufacturers. Simulation results are presented for a sample of four systems. Simulation was deemed successful and accelerates the design process of the metrology system, since a large range of source and filter combinations can be evaluated swiftly. Limitations of the simulation are discussed as well.

Citation Download Citation

Michael Wagner "Simulation of system transmission values for different angles of incidence", Proc. SPIE 12755, Tenth European Seminar on Precision Optics Manufacturing, 1275509 (5 September 2023); https://doi.org/10.1117/12.2676121

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