Compressed sensing approach for temporal and spectral photoluminescence imaging of semiconductors

Aidas Baltušis; George Koutsourakis; Sebastian Wood; James Blakesley; Stephen J. Sweeney

doi:10.1117/12.2673794

10 August 2023 Compressed sensing approach for temporal and spectral photoluminescence imaging of semiconductors

Aidas Baltušis, George Koutsourakis, Sebastian Wood, James Blakesley, Stephen J. Sweeney

Proceedings Volume 12619, Modeling Aspects in Optical Metrology IX; 1261904 (2023) https://doi.org/10.1117/12.2673794
Event: SPIE Optical Metrology, 2023, Munich, Germany

Abstract

Continued improvement of production-scalable characterisation methods is necessary to support the growth of semiconductor industries. In this work we present the application of compressed sensing for photoluminescence imaging in the temporal and spectral domains. The application can be enabled by using a digital micromirror device to programmatically control the spatial information of the excitation or detection source, allowing the use of single-point detectors for imaging applications, with benefits in terms of reduced measurement time and dark noise. We present the methodology for successful compressed sensing acquisition and reconstruction of spectral and temporal photoluminescence signals, developed through computational modelling work.

Conference Presentation

(2023) Published by SPIE. Downloading of the abstract is permitted for personal use only.

Citation Download Citation

Aidas Baltušis, George Koutsourakis, Sebastian Wood, James Blakesley, and Stephen J. Sweeney "Compressed sensing approach for temporal and spectral photoluminescence imaging of semiconductors", Proc. SPIE 12619, Modeling Aspects in Optical Metrology IX, 1261904 (10 August 2023); https://doi.org/10.1117/12.2673794

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