Sparse surface profile reconstruction from scattering light distributions

T. Groche; J. Seewig; V. Follmann; J. Uebel

doi:10.1117/12.2673175

15 August 2023 Sparse surface profile reconstruction from scattering light distributions

T. Groche, J. Seewig, V. Follmann, J. Uebel

Proceedings Volume 12618, Optical Measurement Systems for Industrial Inspection XIII; 126180U (2023) https://doi.org/10.1117/12.2673175
Event: SPIE Optical Metrology, 2023, Munich, Germany

Abstract

Surface characterization is important for the functionality of many applications. For process control applications it is important to measure surface characteristics in-line. Scattering light sensor technique is well suited for in-line measurement due to its robustness against vibrations and the fast measurement speed. But the non-trivial connection between the surface-angle resolved data from the scattering light data and the 3D surface data from other surface measurement system hampers the use of scattering light sensor technique for structured surfaces. To overcome these hindrances we present a method to reconstruct surface profiles from scattering light measurements based on an accurate simulation of the measurement process and a sparse representation of the surface profile incorporating a priori knowledge like the feed rate of a turning process.

Conference Presentation

Citation Download Citation

T. Groche, J. Seewig, V. Follmann, and J. Uebel "Sparse surface profile reconstruction from scattering light distributions", Proc. SPIE 12618, Optical Measurement Systems for Industrial Inspection XIII, 126180U (15 August 2023); https://doi.org/10.1117/12.2673175

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