Silicon nitride waveguide VOC sensor for pyridine vapor detection with high sensitivity (Conference Presentation)

Ke Zhao; Lianghai Dong; Kaixin Chen; Jieyun Wu

doi:10.1117/12.2666702

22 May 2023 Silicon nitride waveguide VOC sensor for pyridine vapor detection with high sensitivity (Conference Presentation)

Ke Zhao, Lianghai Dong, Kaixin Chen, Jieyun Wu

Author Affiliations +

Proceedings Volume 12327, SPIE Future Sensing Technologies 2023; 123270O (2023) https://doi.org/10.1117/12.2666702
Event: SPIE Future Sensing Technologies, 2023, Yokohama, Japan

Abstract

We report a silicon nitride (Si3N4) Mach-Zehnder interferometer (MZI) waveguide for the evanescent-wave detection of carcinogenic volatile organic compound (VOC) pyridine vapor for environment safety. The Si3N4 MZI waveguide is coated with cross-linked dipolar dyes as sensitive cladding for specific pyridine sensing. Waveguide engineering in virtue of evanescent field, cladding thickness and group refractive index regulation is carried out. The sensor chip with width/height of 2μm/200 nm is fabricated by photolithography/developing and ICP etching. In pyridine sensing, the MZI sensor shows the high sensitivity of 19 pm/ppm and the lowest detection limit of 1.5 ppm and fast response of 60s.

Conference Presentation

Citation Download Citation

Ke Zhao, Lianghai Dong, Kaixin Chen, and Jieyun Wu "Silicon nitride waveguide VOC sensor for pyridine vapor detection with high sensitivity (Conference Presentation)", Proc. SPIE 12327, SPIE Future Sensing Technologies 2023, 123270O (22 May 2023); https://doi.org/10.1117/12.2666702

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