Novel approach of patterning technologies enabling monolithic micro-optical components

J. Wolf; M. Ferstl; A. Voigt; S. Grützner; A. Schleunitz; G. Grützner

doi:10.1117/12.2661529

30 April 2023 Novel approach of patterning technologies enabling monolithic micro-optical components

J. Wolf, M. Ferstl, A. Voigt, S. Grützner, A. Schleunitz, G. Grützner

Proceedings Volume 12497, Novel Patterning Technologies 2023; 124970F (2023) https://doi.org/10.1117/12.2661529
Event: SPIE Advanced Lithography + Patterning, 2023, San Jose, California, United States

Abstract

We propose a novel approach of combined patterning technologies to manufacture individualized micro-optical components as required for the integration of system-level optical packaging, e.g. for coupling light into on-chip level waveguides. The presented work consists of an innovative combination of inkjet printing of available optical polymers onto a prepatterned substrate and UV-replication which enables the manufacturing processes for tailor-made polymeric hybrid and biconvex micro-optical components. For this, inkjet printing of the optical polymers InkOrmo or InkEpo is used as a dispensing technique for additive manufacturing. The ink is printed into designated cavities on a patterned substrate that shows either diffractive or refractive features. After UV-induced polymerization, the cured component is separated from the soft mold substrate. This results in a combination of either a diffractive and a refractive element or two convex refractive elements in one monolithic component. The refractive part on top is self-organized by the surface energy and the shape is adjusted with the amount of dispensed ink enabling to tune the refractive power of the lens. The diffractive structure or convex shape on the opposite side of the lens is obtained by replicating the shape of the prepatterned substrate. Such advanced micro-optic components allow in principle a higher degree of system integration and thus further system miniaturization by e.g. substituting a multi lens system with a single hybrid lens. This novel manufacturing concept is composed to cost-effectively implement design requirements, making tailor-made diffractive-refractive lenses easily accessible e.g. to the MEMS/MOEMS community.

Conference Presentation

Citation Download Citation

J. Wolf, M. Ferstl, A. Voigt, S. Grützner, A. Schleunitz, and G. Grützner "Novel approach of patterning technologies enabling monolithic micro-optical components", Proc. SPIE 12497, Novel Patterning Technologies 2023, 124970F (30 April 2023); https://doi.org/10.1117/12.2661529

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