Precise optical constant determination in the soft x-ray, EUV, and VUV spectral range

Najmeh Abbasirad; Qais Saadeh; Richard Ciesielski; Alexander Gottwald; Vicky Philippsen; Igor Makhotkin; Andrey Sokolov; Michael Kolbe; Frank Scholze; Victor Soltwisch

doi:10.1117/12.2659369

27 April 2023 Precise optical constant determination in the soft x-ray, EUV, and VUV spectral range

Najmeh Abbasirad, Qais Saadeh, Richard Ciesielski, Alexander Gottwald, Vicky Philippsen, Igor Makhotkin, Andrey Sokolov, Michael Kolbe, Frank Scholze, Victor Soltwisch

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Proceedings Volume 12496, Metrology, Inspection, and Process Control XXXVII; 124963B (2023) https://doi.org/10.1117/12.2659369
Event: SPIE Advanced Lithography + Patterning, 2023, San Jose, California, United States

Abstract

Optical constants of materials are essential for predicting and interpreting optical responses, which is crucial when designing new optical components. Although accurate databases of optical constants are available for some regions of the electromagnetic spectrum, for the vacuum ultraviolet (VUV), the extreme ultraviolet (EUV), and soft x-ray spectral ranges, the available optical data suffer inconsistencies, and their determination is particularly challenging. Here, we present a selected example of ruthenium (Ru) for the determination of optical constants from the VUV to the soft x-ray spectral range using reflectivity measurements performed with synchrotron radiation. The subtleties of reflectivity measurements are discussed for a large wavelength range, from 0.7 to 200 nanometers.

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Najmeh Abbasirad, Qais Saadeh, Richard Ciesielski, Alexander Gottwald, Vicky Philippsen, Igor Makhotkin, Andrey Sokolov, Michael Kolbe, Frank Scholze, and Victor Soltwisch "Precise optical constant determination in the soft x-ray, EUV, and VUV spectral range", Proc. SPIE 12496, Metrology, Inspection, and Process Control XXXVII, 124963B (27 April 2023); https://doi.org/10.1117/12.2659369

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KEYWORDS

Vacuum ultraviolet

Ruthenium

Extreme ultraviolet

X-rays

Thin films

Film thickness

Monte Carlo methods

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