Precision Figuring and Finishing of Glass Using Femtosecond Lasers

Gong Chen; Jie Qiao

doi:10.1117/12.2650871

17 March 2023 Precision Figuring and Finishing of Glass Using Femtosecond Lasers

Gong Chen, Jie Qiao

Proceedings Volume PC12408, Laser Applications in Microelectronic and Optoelectronic Manufacturing (LAMOM) XXVIII; PC124080N (2023) https://doi.org/10.1117/12.2650871
Event: SPIE LASE, 2023, San Francisco, California, United States

Abstract

Ultrafast laser processing of glass material was investigated to address the need for precise, flexible figuring and finishing tools with minimal thermal effects. A dynamic pulse propagation model was established and used to predict the spatial and temporal distribution of surface temperature, through which a set of optimum laser processing conditions was determined. The impact of laser parameters on material removal and surface quality was experimentally investigated for Borofloat glass. Linearly controllable material removal is achieved with the determined laser parameters, and the processed area maintains the optic-quality surface roughness for various material removal depths. This research was supported by the US National Science Foundation I/UCRC Center for Freeform Optics (IIP-1822049 and IIP-1822026).

Conference Presentation

Citation Download Citation

Gong Chen and Jie Qiao "Precision Figuring and Finishing of Glass Using Femtosecond Lasers", Proc. SPIE PC12408, Laser Applications in Microelectronic and Optoelectronic Manufacturing (LAMOM) XXVIII, PC124080N (17 March 2023); https://doi.org/10.1117/12.2650871

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