On-chip silicon nitride optical phased array as a broadband near-infrared spectrometer

Zuyang Liu; Nicolas Le Thomas; Roel Baets

doi:10.1117/12.2647270

17 March 2023 On-chip silicon nitride optical phased array as a broadband near-infrared spectrometer

Zuyang Liu, Nicolas Le Thomas, Roel Baets

Proceedings Volume 12424, Integrated Optics: Devices, Materials, and Technologies XXVII; 1242409 (2023) https://doi.org/10.1117/12.2647270
Event: SPIE OPTO, 2023, San Francisco, California, United States

Abstract

We demonstrate a novel spectrometer based on a hybrid guided wave and free-space optical system, consisting of a silicon nitride optical phased array (OPA), free-space grating couplers, and Fourier-space imaging to an image sensor. Each wavelength dispersed by the photonic integrated circuit corresponds to a unique position in the Fourier plane. We demonstrate the reconstruction of a spectrum in the near-infrared from the position and the intensity in this plane. From preliminary measurements on a small-sized OPA (0.1 mm²), we report a spectral range of 100 nm and a resolution of around 0.5 nm.

Conference Presentation

Citation Download Citation

Zuyang Liu, Nicolas Le Thomas, and Roel Baets "On-chip silicon nitride optical phased array as a broadband near-infrared spectrometer", Proc. SPIE 12424, Integrated Optics: Devices, Materials, and Technologies XXVII, 1242409 (17 March 2023); https://doi.org/10.1117/12.2647270

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