Design of wireless control system for dual beam interferometer

Xu Jia; Sen Han; Quanying Wu; Linghua Zhang; Xueyuan Li; Quanzhao Wang

doi:10.1117/12.2643444

19 December 2022 Design of wireless control system for dual beam interferometer

Xu Jia, Sen Han, Quanying Wu, Linghua Zhang, Xueyuan Li, Quanzhao Wang

Proceedings Volume 12319, Optical Metrology and Inspection for Industrial Applications IX; 123191G (2022) https://doi.org/10.1117/12.2643444
Event: SPIE/COS Photonics Asia, 2022, Online Only

Conference Poster

Abstract

The traditional interferometry method of large aperture optical elements relies on changing the beam expansion lens and optical path structure artificially according to different test samples, which inevitably introduces some systematic errors. Therefore, this paper proposes a corresponding dual-wire control scheme according to the functional requirements and simulation experiments of dual-optical path interferometer. This scheme is based on serial communication protocol and Zigbee communication protocol. Through the coordination of Zigbee wireless control, serial software control and mechanical structure, the optical path can be folded and calibrated for many times, so that the changing position of the optical element after each switch of measurement aperture is fixed. The real-time status is displayed in the interactive interface developed based on MFC (Microsoft Foundation Classes). Finally, the whole system is tested and verified. The results show that the system can basically complete the real-time debugging of the optical path, which provides a practical design idea for the automatic control of the hybrid interferometer in the future.

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Xu Jia, Sen Han, Quanying Wu, Linghua Zhang, Xueyuan Li, and Quanzhao Wang "Design of wireless control system for dual beam interferometer", Proc. SPIE 12319, Optical Metrology and Inspection for Industrial Applications IX, 123191G (19 December 2022); https://doi.org/10.1117/12.2643444

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