FPGA-based 10Msps high-speed encoder

Lintao Yu; Lidan Zhang

doi:10.1117/12.2641268

4 August 2022 FPGA-based 10Msps high-speed encoder

Lintao Yu, Lidan Zhang

Proceedings Volume 12306, Second International Conference on Digital Signal and Computer Communications (DSCC 2022); 123061Z (2022) https://doi.org/10.1117/12.2641268
Event: Second International Conference on Digital Signal and Computer Communications (DSCC 2022), 2022, Changchun, China

Abstract

In the ultra-precise motion control system of the lithography workpiece table. Existing encoder acquisition systems support only one specific type of optical encoder, i.e., absolute or incremental encoder. In order to achieve the requirements of accurate positioning and high transmission rate. In this paper, we use FPGA to process the encoder signal by BiSS communication protocol module, frequency counter Counter module and data splicing module. Finally, it communicates with the host computer via PCIe. The combined encoder acquisition system has the high accuracy position positioning of absolute encoder and the high transmission rate of incremental encoder. Simulation results show that the data acquisition system is able to process the data quickly and accurately and display the displacement data correctly in the simulation. The design is suitable for the field of lithography where high resolution and fast data transmission are required.

Citation Download Citation

Lintao Yu and Lidan Zhang "FPGA-based 10Msps high-speed encoder", Proc. SPIE 12306, Second International Conference on Digital Signal and Computer Communications (DSCC 2022), 123061Z (4 August 2022); https://doi.org/10.1117/12.2641268

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