Low-power, small-form-factor angle sensing circuit for an electrostatic, quasi-static MEMS mirror in AR applications

Sangtak Park; Matthew Wakelin; Daniel Malea; Bergen Fletcher

doi:10.1117/12.2615023

7 March 2022 Low-power, small-form-factor angle sensing circuit for an electrostatic, quasi-static MEMS mirror in AR applications

Sangtak Park, Matthew Wakelin, Daniel Malea, Bergen Fletcher

Author Affiliations +

Proceedings Volume 11931, Optical Architectures for Displays and Sensing in Augmented, Virtual, and Mixed Reality (AR, VR, MR) III; 119310M (2022) https://doi.org/10.1117/12.2615023
Event: SPIE AR VR MR, 2022, San Francisco, California, United States

Conference Poster

Abstract

This paper presents a new, low-voltage, and small-form-factor analog front-end (AFE) circuit that measures the torsional angle of an electrostatically-actuated, quasi-static MEMS mirror, while it operates at a frame rate of 50 Hz to 60 Hz or higher, following a given angle profile, such as a sawtooth or triangle profile. The quasi-static MEMS mirror is actuated with two high voltage (HV) differential signals. To enforce this quasi-static MEMS mirror to track a given angle profile or trajectory with minimum error, the MEMS mirror is driven by feedback control that requires a sensor capable of measuring its mechanical or optical angle in real time with high enough bandwidth and sensitivity. Hence, we design and implement the angle sensing circuit (ASC) that meets the low-power, low-cost, and small-form-factor requirements to reduce power consumption, size, and weight for AR applications. This ASC consists of a variable gain amplifier (VGA) and an envelope detector that operates at 3.3 V and draws about 1 mA during operation.

Citation Download Citation

Sangtak Park, Matthew Wakelin, Daniel Malea, and Bergen Fletcher "Low-power, small-form-factor angle sensing circuit for an electrostatic, quasi-static MEMS mirror in AR applications", Proc. SPIE 11931, Optical Architectures for Displays and Sensing in Augmented, Virtual, and Mixed Reality (AR, VR, MR) III, 119310M (7 March 2022); https://doi.org/10.1117/12.2615023

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