Simulations of the transmission small angle x-ray scattering for three-dimensional architectures

Tianjuan Yang; Jiahao Zhang; Jianyuan Ma; Shiyuan Liu; Xiuguo Chen

doi:10.1117/12.2612253

19 November 2021 Simulations of the transmission small angle x-ray scattering for three-dimensional architectures

Tianjuan Yang, Jiahao Zhang, Jianyuan Ma, Shiyuan Liu, Xiuguo Chen

Proceedings Volume 12059, Tenth International Symposium on Precision Mechanical Measurements; 120591K (2021) https://doi.org/10.1117/12.2612253
Event: Tenth International Symposium on Precision Mechanical Measurements, 2021, Qingdao, China

Abstract

The semiconductor industry’s device dimensions continue shrinking and device architectures increase in 3D complexity, while incorporating new materials. To keep pace with these changes, new critical in-line metrology accurately and efficiently evaluating the structural profiles will be needed. Small angle X-ray scatterometry shows promise to be considered for critical dimension (CD) metrology for future nodes. In this paper, we report simulation results of the transmission small angle X-ray scattering (T-SAXS) metrology to evaluate its measurement capability for 3D periodic architectures. Based on measurability analysis for various 3D structural models, T-SAXS shows a good potential solution to the future 3D architectures measurement.

Citation Download Citation

Tianjuan Yang, Jiahao Zhang, Jianyuan Ma, Shiyuan Liu, and Xiuguo Chen "Simulations of the transmission small angle x-ray scattering for three-dimensional architectures", Proc. SPIE 12059, Tenth International Symposium on Precision Mechanical Measurements, 120591K (19 November 2021); https://doi.org/10.1117/12.2612253

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