The error analysis and experimental research of micro-angle measurement system based on F-P etalon

Shinan Zhou; Xiaoyan Shen; Chenguang Wu; Dongsheng Li

doi:10.1117/12.2611746

19 November 2021 The error analysis and experimental research of micro-angle measurement system based on F-P etalon

Shinan Zhou, Xiaoyan Shen, Chenguang Wu, Dongsheng Li

Proceedings Volume 12059, Tenth International Symposium on Precision Mechanical Measurements; 120590O (2021) https://doi.org/10.1117/12.2611746
Event: Tenth International Symposium on Precision Mechanical Measurements, 2021, Qingdao, China

Abstract

The modern industry has higher precision demand for micro-angle measurement, the measurement methods and measurement techniques are constantly progressing. A micro-angle measurement method based on the interference imaging principle of F-P etalon was proposed, and the micro-angle measurement can be achieved in conjunction with an effective data processing technique. This paper performs error analysis and experimental study on the measurement system. Theory analyzes the effect of temperature change, nonlinearity of focal length calculation model, focusing error, and F-P etalon interval on micro-angle measurement results, and proposes possible solutions. A micro-angle measurement experiment with different F-P etalon intervals (2 mm, 3 mm, 5 mm) were performed using existing experimental devices. The experimental results show that the uncertainty of the micro-angle measurement results at interval d = 3 mm is optimal; under the current test conditions, the angle measurement uncertainty in the 300" measurement range is not greater than 0.08".

Citation Download Citation

Shinan Zhou, Xiaoyan Shen, Chenguang Wu, and Dongsheng Li "The error analysis and experimental research of micro-angle measurement system based on F-P etalon", Proc. SPIE 12059, Tenth International Symposium on Precision Mechanical Measurements, 120590O (19 November 2021); https://doi.org/10.1117/12.2611746

ACCESS THE FULL ARTICLE

INSTITUTIONAL
Select your institution to access the SPIE Digital Library.

SELECT YOUR INSTITUTION

PERSONAL
Sign in with your SPIE account to access your personal subscriptions or to use specific features such as save to my library, sign up for alerts, save searches, etc.

PERSONAL SIGN IN

No SPIE Account? Create one

PURCHASE THIS CONTENT

SUBSCRIBE TO DIGITAL LIBRARY

50 downloads per 1-year subscription

Members: $195

Non-members: $335 ADD TO CART

25 downloads per 1 - year subscription

Members: $145

Non-members: $250 ADD TO CART

PURCHASE SINGLE ARTICLE

Includes PDF, HTML & Video, when available

Members: $17.00

Non-members: $21.00 ADD TO CART

PROCEEDINGS
11 PAGES

DOWNLOAD PAPER SAVE TO MY LIBRARY

GET CITATION

RIGHTS & PERMISSIONS

Get copyright permission Get copyright permission on Copyright Marketplace

KEYWORDS

Fabry–Perot interferometers

Error analysis

Temperature metrology

Data processing

Image quality

Light sources

Refractive index

Show All Keywords

Keywords/Phrases

Search In:

Publication Years