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5 March 2022 Patterned growth and wafer-scale integration of 2D materials
Masoud Mahjouri-Samani, Suman Jaiswal, Zabihollah Ahmadi, Parvin Fathi-Hafshejani
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Proceedings Volume PC12003, 2D Photonic Materials and Devices V; PC120030G (2022) https://doi.org/10.1117/12.2609921
Event: SPIE OPTO, 2022, San Francisco, California, United States
Abstract
The scalable and patterned growth of two-dimensional (2D) quantum materials is essential for wafer-scale device integration in order to transition their exciting properties and performance from lab to fab. However, the current gas-phase synthesis methods are incompatible with conventional patterning technologies (e.g., lithography) or require extensive top-down processing steps (e.g., etching) to create the desired device structures on the substrates. In this talk, I will describe some of the laser-based approaches we are undertaking to control the synthesis and integration of various 2D materials. I will particularly highlight our recently developed condensed phase growth approach compatible with direct laser writing as well as the conventional lithography and device integration technologies.
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Masoud Mahjouri-Samani, Suman Jaiswal, Zabihollah Ahmadi, and Parvin Fathi-Hafshejani "Patterned growth and wafer-scale integration of 2D materials", Proc. SPIE PC12003, 2D Photonic Materials and Devices V, PC120030G (5 March 2022); https://doi.org/10.1117/12.2609921
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KEYWORDS
Lithography
Chalcogenides
Crystals
Etching
Laser development
Laser processing
Multiphoton lithography
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