Rapid direct nanoimprint lithography manufacturing of visible wavelength metalenses composed of high aspect ratio TiO2 nanoposts

Vincent Einck; Andrew McClung; Dan Eon Jung; Mahsa Torfeh; Mahdad Mansouree; James Watkins; Amir Arbabi

doi:10.1117/12.2609853

5 March 2022 Rapid direct nanoimprint lithography manufacturing of visible wavelength metalenses composed of high aspect ratio TiO₂ nanoposts

Vincent Einck, Andrew McClung, Dan Eon Jung, Mahsa Torfeh, Mahdad Mansouree, James Watkins, Amir Arbabi

Author Affiliations +

Proceedings Volume PC12011, High Contrast Metastructures XI; PC120110W (2022) https://doi.org/10.1117/12.2609853
Event: SPIE OPTO, 2022, San Francisco, California, United States

Abstract

We describe a high throughput approach to all-inorganic metalens manufacturing using a single step nanoimprint lithography process and titania nanoparticle-based inks. The process yields a refractive index of 1.9, lenses with critical dimensions below 60 nm, feature aspect ratios greater than 8, and efficiencies greater than 55% and consistent device performance across 15 lenses printed within 30 minutes. We further describe pathways to fabricating all-inorganic lenses with RI of 2.1.

Conference Presentation

Citation Download Citation

Vincent Einck, Andrew McClung, Dan Eon Jung, Mahsa Torfeh, Mahdad Mansouree, James Watkins, and Amir Arbabi "Rapid direct nanoimprint lithography manufacturing of visible wavelength metalenses composed of high aspect ratio TiO₂ nanoposts", Proc. SPIE PC12011, High Contrast Metastructures XI, PC120110W (5 March 2022); https://doi.org/10.1117/12.2609853

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