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9 March 2022 Electrothermal MEMS grating based miniaturized spectrometer
Jaehun Jeon, Myeong-su Ahn, Jung-Woo Park, Gi Beom Kim, Ki-Hun Jeong
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Proceedings Volume PC12013, MOEMS and Miniaturized Systems XXI; PC1201307 (2022) https://doi.org/10.1117/12.2608480
Event: SPIE OPTO, 2022, San Francisco, California, United States
Abstract
This paper reports a miniaturized spectrometer with enhanced spectral resolution using electrothermal MEMS grating. The MEMS (Micro-electromechanical systems) grating is fabricated on SOI (Silicon on Insulator) wafer and consists of Aluminum/Silicon bimorph, reflective diffraction grating, entrance and exit slit. The MEMS grating scans and single pixel photodiode detects the diffracted spectral signal. The electrothermal actuation and higly dispersive optics of the MEMS grating provides large stroke with low operation voltage to widen the spectral range, and facilitates enhaced spectral resolution in small volume, respectively. This miniaturized spectrometer will deliver diverse application in various fields by providing accurate on-filed molecular analysis.
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Jaehun Jeon, Myeong-su Ahn, Jung-Woo Park, Gi Beom Kim, and Ki-Hun Jeong "Electrothermal MEMS grating based miniaturized spectrometer", Proc. SPIE PC12013, MOEMS and Miniaturized Systems XXI, PC1201307 (9 March 2022); https://doi.org/10.1117/12.2608480
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KEYWORDS
Microelectromechanical systems
Spectroscopy
Diffraction gratings
Signal detection
Silicon
Spectral resolution
Molecular spectroscopy
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