Flexible organic transistors with submicron channel lengths and gate-to-contact overlaps

Hagen Klauk; Ute Zschieschang

doi:10.1117/12.2597202

1 August 2021 Flexible organic transistors with submicron channel lengths and gate-to-contact overlaps

Hagen Klauk, Ute Zschieschang

Proceedings Volume 11811, Organic and Hybrid Field-Effect Transistors XX; 118110F (2021) https://doi.org/10.1117/12.2597202
Event: SPIE Organic Photonics + Electronics, 2021, San Diego, California, United States

Abstract

Using direct-write electron-beam lithography, low-voltage organic thin-film transistors (TFTs) with channel lengths and parasitic gate-to-source and gate-to-drain overlaps as small as 100 nm have been fabricated on flexible polymeric substrates. Despite the small channel lengths and gate-to-contact overlaps, these TFTs display good static current-voltage characteristics, including on/off current ratios of nine orders of magnitude, subthreshold swings of about 100 mV/decade, turn-on voltages of 0 V, negligibly small threshold-voltage roll-off, and contact resistances below 1 kOhm-cm. TFTs with such small critical dimensions are of interest for high-frequency applications.

Conference Presentation

Citation Download Citation

Hagen Klauk and Ute Zschieschang "Flexible organic transistors with submicron channel lengths and gate-to-contact overlaps", Proc. SPIE 11811, Organic and Hybrid Field-Effect Transistors XX, 118110F (1 August 2021); https://doi.org/10.1117/12.2597202

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