Combined processing of optical parts through surface polishing with a beam of fast argon atoms and deposition of nanostructured protective films by magnetron target sputtering

Sergey N. Grigoriev; Alexander S. Metel; Yury A. Melnik; Enver S. Mustafaev; Marina A. Volosova

doi:10.1117/12.2594368

1 August 2021 Combined processing of optical parts through surface polishing with a beam of fast argon atoms and deposition of nanostructured protective films by magnetron target sputtering

Sergey N. Grigoriev, Alexander S. Metel, Yury A. Melnik, Enver S. Mustafaev, Marina A. Volosova

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Proceedings Volume 11802, Nanoengineering: Fabrication, Properties, Optics, Thin Films, and Devices XVIII; 118020V (2021) https://doi.org/10.1117/12.2594368
Event: SPIE Nanoscience + Engineering, 2021, San Diego, California, United States

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Abstract

The research presents the principles of development and practical implementation (including rational modes) of combined treatment technology for the surface of precision parts with a broad beam of ions and/or fast argon atoms. In a single technological cycle, two process stages are realized: polishing with a beam at an incidence of 80º to the surface of parts made of different material, which enables a precision level of the surface roughness and deposition of protective nanostructured films on the parts immersed in dense plasma produced by magnetron sputtering in a mixture of inert and reactive gases. The developed innovative technology has a wide range of technological applications, but a particularly promising area is the processing of optical parts and elements.

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Sergey N. Grigoriev, Alexander S. Metel, Yury A. Melnik, Enver S. Mustafaev, and Marina A. Volosova "Combined processing of optical parts through surface polishing with a beam of fast argon atoms and deposition of nanostructured protective films by magnetron target sputtering", Proc. SPIE 11802, Nanoengineering: Fabrication, Properties, Optics, Thin Films, and Devices XVIII, 118020V (1 August 2021); https://doi.org/10.1117/12.2594368

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