Innovative ECDL design based on a resonant MEMS scanner for ultra-fast tuning in the MIR range

Morten Hoppe; Sebastian Schmidtmann; Christian Aβmann; Martin Honsberg; Herve Tatenguem; Tobias Milde; Thomas Schanze; Joachim Sacher; Shanshan Gu-Stoppel; Frank Senger

doi:10.1117/12.2578913

5 March 2021 Innovative ECDL design based on a resonant MEMS scanner for ultra-fast tuning in the MIR range

Morten Hoppe, Sebastian Schmidtmann, Christian Aβmann, Martin Honsberg, Herve Tatenguem, Tobias Milde, Thomas Schanze, Joachim Sacher, Shanshan Gu-Stoppel, Frank Senger

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Proceedings Volume 11697, MOEMS and Miniaturized Systems XX; 1169709 (2021) https://doi.org/10.1117/12.2578913
Event: SPIE OPTO, 2021, Online Only

Abstract

Although external cavity diode lasers have become firmly established for their excellent properties for species detection, they have severe limitations in terms of high acquisition rates. In this paper, we present our new ECDL design based on a resonantly driven MEMS scanner. By using the MEMS technology, a defined frequency range can be tuned extremely fast and without mode-hops. This allows scanning frequencies in the high kHz range to be achieved. The results of the characterization of the spectral properties of the MEMS-based system and its use for rapid detection of trace gases are presented.

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Morten Hoppe, Sebastian Schmidtmann, Christian Aβmann, Martin Honsberg, Herve Tatenguem, Tobias Milde, Thomas Schanze, Joachim Sacher, Shanshan Gu-Stoppel, and Frank Senger "Innovative ECDL design based on a resonant MEMS scanner for ultra-fast tuning in the MIR range", Proc. SPIE 11697, MOEMS and Miniaturized Systems XX, 1169709 (5 March 2021); https://doi.org/10.1117/12.2578913

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