Photonic integration: from wafer level to the module

Christian Bosshard; Rolando Ferrini; Stefan Mohrdiek; Oscar Fernandez; Ton Offermans; Roger Krähenbühl; Angelique Luu-Dinh; Frederic Zanella; Guillaume Basset; Rony Jose James; Mark Fretz; Guido Spinola Durante; Amir Ghadimi

doi:10.1117/12.2578669

5 March 2021 Photonic integration: from wafer level to the module

Christian Bosshard, Rolando Ferrini, Stefan Mohrdiek, Oscar Fernandez, Ton Offermans, Roger Krähenbühl, Angelique Luu-Dinh, Frederic Zanella, Guillaume Basset, Rony Jose James, Mark Fretz, Guido Spinola Durante, Amir Ghadimi

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Proceedings Volume 11692, Optical Interconnects XXI; 116920Q (2021) https://doi.org/10.1117/12.2578669
Event: SPIE OPTO, 2021, Online Only

Abstract

Photonics integration continues to be a main driver for innovation in multiple aspects, including wafer-scale integration, new materials, sub-micron alignment of components and protection from harsh environment. We show cost-effective fabrication technologies of micro-optical components by UV wafer-scale replication into chemically stable polymers. Furthermore, for simplified fiber coupling and packaging, a novel 90° optical interconnect is presented, integrated with self-alignment structures. Replicated, space compliant microlenses on packaged CMOS imagers show improved light sensitivity by a factor 1.8. A laser based, low stress bonding process is explored to generate wafer-scale hermetic enclosures for harsh environment applications ranging from space to implants.

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Christian Bosshard, Rolando Ferrini, Stefan Mohrdiek, Oscar Fernandez, Ton Offermans, Roger Krähenbühl, Angelique Luu-Dinh, Frederic Zanella, Guillaume Basset, Rony Jose James, Mark Fretz, Guido Spinola Durante, and Amir Ghadimi "Photonic integration: from wafer level to the module", Proc. SPIE 11692, Optical Interconnects XXI, 116920Q (5 March 2021); https://doi.org/10.1117/12.2578669

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KEYWORDS

Semiconducting wafers

Ultraviolet radiation

Microlens

Silicon carbide

Standards development

Structured optical fibers

Thermography

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