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6 March 2020 Hybrid ultrasound-detection platform based on silicon photonics and transparent polymers (Conference Presentation)
Resmi R. Kumar, Evgeny Hahamovich, Shai Tsesses, Yoav Hazan, Assaf Grinberg, Amir Rosenthal
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Proceedings Volume 11240, Photons Plus Ultrasound: Imaging and Sensing 2020; 112400X (2020) https://doi.org/10.1117/12.2542155
Event: SPIE BiOS, 2020, San Francisco, California, United States
Abstract
Silicon photonics represents an attractive platform for optical sensing of ultrasound owing to the high light confinement it can achieved, which can enable the development of detector with sub-micron sizes. However, the small elasto-optic coefficients of silicon and silica limit the sensitivity of conventional silicon-on-insulator (SOI) sensors, in which the silicon core is surrounded by a silica cladding. In this work, we demonstrate an order-of-magnitude increase in the response of a silicon-photonics waveguide to ultrasound by replacing the silica over-cladding with bisbenzocyclobutene (BCB) - a transparent polymer with a high elasto-optic coefficient.
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Resmi R. Kumar, Evgeny Hahamovich, Shai Tsesses, Yoav Hazan, Assaf Grinberg, and Amir Rosenthal "Hybrid ultrasound-detection platform based on silicon photonics and transparent polymers (Conference Presentation)", Proc. SPIE 11240, Photons Plus Ultrasound: Imaging and Sensing 2020, 112400X (6 March 2020); https://doi.org/10.1117/12.2542155
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KEYWORDS
Polymers
Silicon photonics
Silicon
Silica
Ultrasonography
Acoustics
Optical sensing
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