Combined spectroscopic ellipsometry and reflectometry for advanced semiconductor fabrication metrology

William A. McGahan; Blaine R. Spady; John A. Iacoponi; John D. Williams

doi:10.1117/12.250927

13 September 1996 Combined spectroscopic ellipsometry and reflectometry for advanced semiconductor fabrication metrology

William A. McGahan, Blaine R. Spady, John A. Iacoponi, John D. Williams

Author Affiliations +

Proceedings Volume 2877, Optical Characterization Techniques for High-Performance Microelectronic Device Manufacturing III; (1996) https://doi.org/10.1117/12.250927
Event: Microelectronic Manufacturing 1996, 1996, Austin, TX, United States

Abstract

Spectroscopic reflectometry has been a mainstay of optical semiconductor metrology for many years, as has single wavelength ellipsometry performed at a fixed angle of incidence. More recently, spectroscopic ellipsometry has been employed to provide film thickness and optical constant measurements with greater precision and accuracy. In this work we demonstrate the combined use of spectroscopic ellipsometry (performed from 420 - 720 nm at 75 degree angle of incidence) and spectroscopic reflectometry (performed from 200 to 800 nm at normal incidence) for the characterization of thin films and multilayer stacks commonly encountered in semiconductor device fabrication. By employing sophisticated parametric dispersion models and simultaneously fitting both the reflectance and ellipsometric spectra, we are able to perform accurate and precise characterization of many structures that cannot be characterized with either technique alone or with combined reflectometry and single wavelength ellipsometry.

Citation Download Citation

William A. McGahan, Blaine R. Spady, John A. Iacoponi, and John D. Williams "Combined spectroscopic ellipsometry and reflectometry for advanced semiconductor fabrication metrology", Proc. SPIE 2877, Optical Characterization Techniques for High-Performance Microelectronic Device Manufacturing III, (13 September 1996); https://doi.org/10.1117/12.250927

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