Verification and analysis of FEM for measurement of temperature distribution through the multilayer wall

Vladimir Skliarov; Pavel Neyezhmakov; Alexander Prokopov

doi:10.1117/12.2506890

26 March 2019 Verification and analysis of FEM for measurement of temperature distribution through the multilayer wall

Vladimir Skliarov, Pavel Neyezhmakov, Alexander Prokopov

Proceedings Volume 10959, Metrology, Inspection, and Process Control for Microlithography XXXIII; 109592Y (2019) https://doi.org/10.1117/12.2506890
Event: SPIE Advanced Lithography, 2019, San Jose, California, United States

Abstract

The use of the finite element method in engineering calculations almost always brings some simplification in relation to the real object. Since the finite element method is a numerical method, the accuracy of the results obtained depends on the type, size and location of finite elements. In the general case, the use of models with a large mesh gives understated results. Reducing the size of an element provides the required refining of the calculation model and obtaining results that are more reliable. However, the use of finite elements of a higher order does not always lead to an increase in the accuracy of the results obtained, and in some cases, it is irrational.

An important element in the application of modern engineering software packages for solving metrological problems (modeling of measurement processes, calculations of the characteristics of components of the national measurement standards) is the reliability of the results obtained, the adjustment of the results obtained with the results got by analytical calculation with the use of classical equations (the explicit solution).

The purpose of the work is to confirm the reliability of calculations of finite element modeling in the study of the distribution of temperature field through the composition panel. Calculations are made using the academic version of the software package of engineering analysis and by the classical matrix algebra method for solving temperature problems. Based on the obtained results, conclusions are made regarding the reliability of finite element modeling data.

Citation Download Citation

Vladimir Skliarov, Pavel Neyezhmakov, and Alexander Prokopov "Verification and analysis of FEM for measurement of temperature distribution through the multilayer wall", Proc. SPIE 10959, Metrology, Inspection, and Process Control for Microlithography XXXIII, 109592Y (26 March 2019); https://doi.org/10.1117/12.2506890

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KEYWORDS

Finite element methods

Reliability

Temperature metrology

Thermal effects

Software engineering

Standards development

Metrology

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